李运甲

西安交通大学副教授，博士生导师，于2014年在瑞士苏黎世联邦理工学院微纳米系统组获得博士学位。2014年3月至2015年7月，担任microGauge（现为microGauge AG，瑞士苏黎世，www.microgauge.ch）首席技术官，负责开发高精度MEMS谐振真空压力传感器，2015年获得 "Venture Top5 "和 "Venture Kick Finalist "奖项。自2016年1月起，在中国西安交通大学电气工程学院担任副教授，IEEE的高级会员，担任IEEE工业电子学会（IES）的MEMS和纳米技术技术委员会主席，IEEE IES AdCom和IEEE纳米技术委员会AdCom的成员，IEEE纳米技术委员会标准委员会的成员，于2019年、2020年和2021年的IEEE工业电子学会年会以及2020年和2021年的IEEE国际工业技术会议中担任会议主席，致力于设备和系统层面的电容/电感式传感器、执行器和能量采集器的研究。

Yunjia Li received a Ph.D. degree from the group of Micro and Nanosystems, ETH Zurich, Switzerland, in 2014. From March 2014 to July 2015, he worked as the CTO of microGauge (Currently microGauge AG, Zurich, Switzerland, www.microgauge.ch), where he was in charge of developing a high-precision MEMS resonant vacuum pressure sensor and won the “Venture Top5” and “Venture Kick Finalist” awards in 2015. Since January 2016, he has been an associate professor at the School of Electrical Engineering, Xi’an Jiaotong University. He is also a senior member of IEEE, the chair of the technical committee on MEMS and nanotechnologies of IEEE Industrial Electronics Society (IES), a member of the IEEE IES AdCom and IEEE Nanotechnology Council AdCom, and a member of the IEEE Nanotechnology Council Standards Committee. He served as track and session chairs of the Annual Conference of the IEEE Industrial Electronics Society in 2019, 2020, and 2021 and the IEEE International Conference on Industrial Technology in 2020 and 2021. His research interests include capacitive/inductive sensors, actuators, and energy harvesters, on both device and system level.

微机电系统（MEMS）技术使传感器和执行器的制造和集成达到了超小型化的程度，与传统的传感器和执行器相比，其性能和成本都有了明显的提高。在过去的几十年里，消费电子和智能产业的空前发展推动了MEMS器件的技术和市场需求，这为MEMS的学术界和产业界创造了强大的市场拉力和巨大的机会。在本讲座中，将首先介绍MEMS器件的基本概念、制造技术、封装和集成方法。然后，将在真实的工业案例的基础上，解释MEMS器件商业化的可能性和典型路线。讲座将特别关注从大学环境中开发的技术创建技术创业公司的一般方法，这可能对技术创业的爱好者有所帮助。

Microelectromechanical systems (MEMS) technologies enable the fabrication and integration of sensors and actuators on an ultra-miniaturized scale, significantly improving the performance and cost over traditional sensors and actuators. In the past decades, the unprecedented development of consumer electronics and the intelligent industry has boosted the technology and market needs of MEMS devices, creating strong market demand and enormous opportunities in academia and the MEMS industry. In this talk, the fundamental concepts, fabrication technologies, packaging, and integration methods of MEMS devices will be introduced. Next, the possibilities and typical routes towards MEMS devices commercialization will be explained based on real-world industrial examples. The talk will primarily focus on the general approach of creating a technological start-up company from the technology developed in a university environment, which might be helpful for technical entrepreneurship enthusiasts.